A. Chaiken, L.J.
Terminello, and J. Wong
Lawrence Livermore National Laboratory, Livermore, CA 94550
GM Research and Development Laboratory, Warren, MI 48090
T. Sato NIRIM, Tsukuba City, Japan
B and N K-edge x-ray absorption spectroscopy measurements
have been performed on three BN thin films grown on Si
substrates using ion-assisted pulsed laser deposition.
Comparison of the films' spectra to those of several
single-phase BN powder standards shows that the films consist
primarily of sp2 bonds. Other features in the
films' spectra suggest the presence of secondary phases,
possibly cubic or rhombohedral BN. Films grown at higher
deposition rates and higher ion-beam voltages are found to be
more disordered, in agreement with previous work.