X-Ray Absorption Study of Pulsed Laser Deposited Boron Nitride Films

A. Chaiken, L.J. Terminello, and J. Wong
Lawrence Livermore National Laboratory, Livermore, CA 94550

G.L. Doll
GM Research and Development Laboratory, Warren, MI 48090

T. Sato NIRIM, Tsukuba City, Japan

Published in Proceedings of Symposium N, Fall '93 MRS.

B and N K-edge x-ray absorption spectroscopy measurements have been performed on three BN thin films grown on Si substrates using ion-assisted pulsed laser deposition. Comparison of the films' spectra to those of several single-phase BN powder standards shows that the films consist primarily of sp² bonds. Other features in the films' spectra suggest the presence of secondary phases, possibly cubic or rhombohedral BN. Films grown at higher deposition rates and higher ion-beam voltages are found to be more disordered, in agreement with previous work.

• Introduction
• Experimental Details
• Results
• Discussion
• Conclusions
• References
• Figures